Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon: Fid-Bau Portal

Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon

Tanaka, M. / Higashida, K. / Nakashima, H. / Takagi, H. / Fujiwara, M.

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Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon

Tanaka, M. / Higashida, K. / Nakashima, H. / Takagi, H. / Fujiwara, M.

Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon

Tanaka, M. / Higashida, K. / Nakashima, H. / Takagi, H. / Fujiwara, M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Orientation dependence of fracture toughness measured by indentation methods and its relation to surface energy in single crystal silicon

Contributors:

Tanaka, M. (author) / Higashida, K. (author) / Nakashima, H. (author) / Takagi, H. (author) / Fujiwara, M. (author)

Published in:

INTERNATIONAL JOURNAL OF FRACTURE ; 139 ; 383-394

Publication date:

2006-01-01

Size:

12 pages

ISSN:

0376-9429

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1126

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