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Recent Progress of SiC Hot-Wall Epitaxy and Its Modeling
Recent Progress of SiC Hot-Wall Epitaxy and Its Modeling
Recent Progress of SiC Hot-Wall Epitaxy and Its Modeling
Nishizawa, S. (Autor:in) / Pons, M. (Autor:in) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
01.01.2006
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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