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Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD
Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD
Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD
Chen, L. (Autor:in) / Fu, X. A. (Autor:in) / Zorman, C. A. (Autor:in) / Mehregany, M. (Autor:in) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
01.01.2006
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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