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Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD

Chen, L. / Fu, X. A. / Zorman, C. A. / Mehregany, M.

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Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD

Chen, L. / Fu, X. A. / Zorman, C. A. / Mehregany, M.

Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD

Chen, L. / Fu, X. A. / Zorman, C. A. / Mehregany, M.

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Order at Subito €

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Document information

Title:

Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD

Contributors:

Chen, L. (author) / Fu, X. A. (author) / Zorman, C. A. (author) / Mehregany, M. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

Published in:

Silicon Carbide and Related Materials - 2005 ; 755-758

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Nanoscale pores enable fast transport

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