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Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films
Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films
Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films
Dana, A. (Autor:in) / Tokay, S. (Autor:in) / Aydinli, A. (Autor:in)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 848-852
01.01.2006
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.38152
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