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    Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films

    New search for: Dana, A.
    New search for: Tokay, S.
    New search for: Aydinli, A.

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    Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films

    New search for: Dana, A.
    New search for: Tokay, S.
    New search for: Aydinli, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films

    New search for: Dana, A.
    New search for: Tokay, S.
    New search for: Aydinli, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Formation of Ge nanocrystals and SiGe in PECVD grown SiNx:Ge thin films

    Contributors:

    Dana, A. (author) / Tokay, S. (author) / Aydinli, A. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 848-852

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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