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Adsorption and decomposition of triethylsilane on Si(100)
Adsorption and decomposition of triethylsilane on Si(100)
Adsorption and decomposition of triethylsilane on Si(100)
Lozano, J. (Autor:in) / Brickman, A. (Autor:in) / Yeninas, S. (Autor:in) / Early, D. (Autor:in) / Craig, J. H. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 3066-3071
01.01.2007
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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