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Adsorption and decomposition of triethylsilane on Si(100)
Adsorption and decomposition of triethylsilane on Si(100)
Adsorption and decomposition of triethylsilane on Si(100)
Lozano, J. (author) / Brickman, A. (author) / Yeninas, S. (author) / Early, D. (author) / Craig, J. H. (author)
APPLIED SURFACE SCIENCE ; 253 ; 3066-3071
2007-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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