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Organic contaminants removal by oxygen ECR plasma
Organic contaminants removal by oxygen ECR plasma
Organic contaminants removal by oxygen ECR plasma
Lee, C. (Autor:in) / Kim, H. W. (Autor:in) / Kim, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 253 ; 3658-3663
01.01.2007
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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