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Fabrication of amorphous silicon nanocones by bias-enhanced microwave plasma CVD
Fabrication of amorphous silicon nanocones by bias-enhanced microwave plasma CVD
Fabrication of amorphous silicon nanocones by bias-enhanced microwave plasma CVD
Chaisitsak, S. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 137 ; 205-209
01.01.2007
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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