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Fabrication of amorphous silicon nanocones by bias-enhanced microwave plasma CVD
Fabrication of amorphous silicon nanocones by bias-enhanced microwave plasma CVD
Fabrication of amorphous silicon nanocones by bias-enhanced microwave plasma CVD
Chaisitsak, S. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 137 ; 205-209
2007-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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