A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
The influence of laser-induced surface modifications on the backside etching process
The influence of laser-induced surface modifications on the backside etching process
The influence of laser-induced surface modifications on the backside etching process
Zimmer, K. (author) / Bohme, R. (author) / Ruthe, D. (author) / Rauschenbach, B. (author)
APPLIED SURFACE SCIENCE ; 253 ; 6588-6594
2007-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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