Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Testing the viscoelastic properties of SU8 photo resist thin films at different stages of processing by nanoindentation creep and stress relaxation
Testing the viscoelastic properties of SU8 photo resist thin films at different stages of processing by nanoindentation creep and stress relaxation
Testing the viscoelastic properties of SU8 photo resist thin films at different stages of processing by nanoindentation creep and stress relaxation
Schiffmann, K. I. (Autor:in) / Brill, C. (Autor:in)
INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 98 ; 397-403
01.01.2007
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
669.9
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