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The effect of porogen on physical properties in MTMS–BTMSE spin-on organosilicates
The effect of porogen on physical properties in MTMS–BTMSE spin-on organosilicates
The effect of porogen on physical properties in MTMS–BTMSE spin-on organosilicates
Kim, B. R. (Autor:in) / Son, J. M. (Autor:in) / Ko, M. J. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 42 ; 5381-5390
01.01.2007
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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