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The effect of porogen on physical properties in MTMS–BTMSE spin-on organosilicates
The effect of porogen on physical properties in MTMS–BTMSE spin-on organosilicates
The effect of porogen on physical properties in MTMS–BTMSE spin-on organosilicates
Kim, B. R. (author) / Son, J. M. (author) / Ko, M. J. (author)
JOURNAL OF MATERIALS SCIENCE ; 42 ; 5381-5390
2007-01-01
10 pages
Article (Journal)
English
DDC:
620.11
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