Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition: Fid-Bau Portal

Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

Shen, Y. / Shao, S. / Yu, H. / Fan, Z. / He, H. / Shao, J.

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Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

Shen, Y. / Shao, S. / Yu, H. / Fan, Z. / He, H. / Shao, J.

Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

Shen, Y. / Shao, S. / Yu, H. / Fan, Z. / He, H. / Shao, J.

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Titel:

Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

Beteiligte:

Shen, Y. (Autor:in) / Shao, S. (Autor:in) / Yu, H. (Autor:in) / Fan, Z. (Autor:in) / He, H. (Autor:in) / Shao, J. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 254 ; 552-556

Erscheinungsdatum:

01.01.2007

Format / Umfang:

5 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

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