Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition: Fid-Bau Portal

Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

Shen, Y. / Shao, S. / Yu, H. / Fan, Z. / He, H. / Shao, J.

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Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

Shen, Y. / Shao, S. / Yu, H. / Fan, Z. / He, H. / Shao, J.

Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

Shen, Y. / Shao, S. / Yu, H. / Fan, Z. / He, H. / Shao, J.

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Check availability in my library

Order at Subito €

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Document information

Title:

Influences of oxygen partial pressure on structure and related properties of ZrO2 thin films prepared by electron beam evaporation deposition

Contributors:

Shen, Y. (author) / Shao, S. (author) / Yu, H. (author) / Fan, Z. (author) / He, H. (author) / Shao, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 552-556

Publication date:

2007-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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