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Theoretical Analysis and Experimental Verification of Triangular Fracture Defects of MgO Single Crystal Substrate in Lapping or Polishing Process
Theoretical Analysis and Experimental Verification of Triangular Fracture Defects of MgO Single Crystal Substrate in Lapping or Polishing Process
Theoretical Analysis and Experimental Verification of Triangular Fracture Defects of MgO Single Crystal Substrate in Lapping or Polishing Process
Wang, K. (Autor:in) / Kang, R.K. (Autor:in) / Jin, Z.J. (Autor:in) / Guo, D.M. (Autor:in) / Jin, G.F. / Lee, W.B. / Cheung, C.F. / To, S.
01.01.2008
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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