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TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM
TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM
TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM
Takagi, M. (Autor:in) / Onodera, K. (Autor:in) / Matsumuro, A. (Autor:in) / Iwata, H. (Autor:in) / Sasaki, K. (Autor:in) / Saka, H. (Autor:in)
MATERIALS TRANSACTIONS ; 49 ; 1298-1302
01.01.2008
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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