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TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM
TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM
TEM and HRTEM Observations of Microstructural Change of Silicon Single Crystal Scratched under Very Small Loading Forces by AFM
Takagi, M. (author) / Onodera, K. (author) / Matsumuro, A. (author) / Iwata, H. (author) / Sasaki, K. (author) / Saka, H. (author)
MATERIALS TRANSACTIONS ; 49 ; 1298-1302
2008-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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