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The Impact of Chemical-Mechanical Polishing on Defective 4H-SiC Schottky Barrier Diodes
The Impact of Chemical-Mechanical Polishing on Defective 4H-SiC Schottky Barrier Diodes
The Impact of Chemical-Mechanical Polishing on Defective 4H-SiC Schottky Barrier Diodes
Lee, K.Y. (Autor:in) / Chen, W.Z. (Autor:in) / Capano, M.A. (Autor:in)
MATERIALS SCIENCE FORUM ; 600/603 ; 827-830
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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