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HRTEM Analysis of AlN Layer Grown on 3C-SiC/Si Heteroepitaxial Substrates with Various Surface Orientations
HRTEM Analysis of AlN Layer Grown on 3C-SiC/Si Heteroepitaxial Substrates with Various Surface Orientations
HRTEM Analysis of AlN Layer Grown on 3C-SiC/Si Heteroepitaxial Substrates with Various Surface Orientations
Isshiki, T. (Autor:in) / Nishio, K. (Autor:in) / Abe, Y. (Autor:in) / Komiyama, J. (Autor:in) / Suzuki, S. (Autor:in) / Nakanishi, H. (Autor:in)
MATERIALS SCIENCE FORUM ; 600/603 ; 1317-1320
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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