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HRTEM Analysis of AlN Layer Grown on 3C-SiC/Si Heteroepitaxial Substrates with Various Surface Orientations
HRTEM Analysis of AlN Layer Grown on 3C-SiC/Si Heteroepitaxial Substrates with Various Surface Orientations
HRTEM Analysis of AlN Layer Grown on 3C-SiC/Si Heteroepitaxial Substrates with Various Surface Orientations
Isshiki, T. (author) / Nishio, K. (author) / Abe, Y. (author) / Komiyama, J. (author) / Suzuki, S. (author) / Nakanishi, H. (author)
MATERIALS SCIENCE FORUM ; 600/603 ; 1317-1320
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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