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Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM
Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM
Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM
APPLIED SURFACE SCIENCE ; 255 ; 4673-4679
01.01.2009
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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