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    Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM

    New search for: Jin, Y.
    New search for: Wu, W.
    New search for: Li, L.
    New search for: Chen, J.
    New search for: Zhang, J.
    New search for: Zuo, Y.
    New search for: Fu, J.

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    Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM

    New search for: Jin, Y.
    New search for: Wu, W.
    New search for: Li, L.
    New search for: Chen, J.
    New search for: Zhang, J.
    New search for: Zuo, Y.
    New search for: Fu, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM

    New search for: Jin, Y.
    New search for: Wu, W.
    New search for: Li, L.
    New search for: Chen, J.
    New search for: Zhang, J.
    New search for: Zuo, Y.
    New search for: Fu, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM

    Contributors:

    Jin, Y. (author) / Wu, W. (author) / Li, L. (author) / Chen, J. (author) / Zhang, J. (author) / Zuo, Y. (author) / Fu, J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 4673-4679

    Publication date:

    2009-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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