Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Measuring substrate-independent modulus of dielectric films by instrumented indentation
Hay, J. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 24 ; 667-677
01.01.2009
11 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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