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    Measuring substrate-independent modulus of dielectric films by instrumented indentation

    New search for: Hay, J.

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    Measuring substrate-independent modulus of dielectric films by instrumented indentation

    New search for: Hay, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Measuring substrate-independent modulus of dielectric films by instrumented indentation

    New search for: Hay, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Measuring substrate-independent modulus of dielectric films by instrumented indentation

    Contributors:

    Hay, J. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 24 ; 667-677

    Publication date:

    2009-01-01

    Size:

    11 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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