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Microscopic underpinnings of defect nucleation and growth in silicon crystal growth and wafer processing
Microscopic underpinnings of defect nucleation and growth in silicon crystal growth and wafer processing
Microscopic underpinnings of defect nucleation and growth in silicon crystal growth and wafer processing
Sinno, T. (Autor:in) / Dai, J. (Autor:in) / Kapur, S. S. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 128-133
01.01.2009
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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