Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
He implantation induced nanovoids in crystalline Si
He implantation induced nanovoids in crystalline Si
He implantation induced nanovoids in crystalline Si
Kilpelainen, S. (Autor:in) / Kuitunen, K. (Autor:in) / Slotte, J. (Autor:in) / Tuomisto, F. (Autor:in) / Bruno, E. (Autor:in) / Mirabella, S. (Autor:in) / Priolo, F. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 164-167
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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