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He implantation induced nanovoids in crystalline Si
He implantation induced nanovoids in crystalline Si
He implantation induced nanovoids in crystalline Si
Kilpelainen, S. (author) / Kuitunen, K. (author) / Slotte, J. (author) / Tuomisto, F. (author) / Bruno, E. (author) / Mirabella, S. (author) / Priolo, F. (author)
MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 164-167
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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