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Oxidation Process of SiC by RTP Technique
Oxidation Process of SiC by RTP Technique
Oxidation Process of SiC by RTP Technique
Kwietniewski, N. (Autor:in) / Golaszewska, K. (Autor:in) / Piotrowski, T.T. (Autor:in) / Rzodkiewicz, W. (Autor:in) / Gutt, T. (Autor:in) / Sochacki, M. (Autor:in) / Szmidt, J. (Autor:in) / Piotrowska, A. (Autor:in)
MATERIALS SCIENCE FORUM ; 615/617 ; 529-532
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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