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Oxidation Process of SiC by RTP Technique

Kwietniewski, N. / Golaszewska, K. / Piotrowski, T.T. / Rzodkiewicz, W. / Gutt, T. / Sochacki, M. / Szmidt, J. / Piotrowska, A.

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Oxidation Process of SiC by RTP Technique

Kwietniewski, N. / Golaszewska, K. / Piotrowski, T.T. / Rzodkiewicz, W. / Gutt, T. / Sochacki, M. / Szmidt, J. / Piotrowska, A.

Oxidation Process of SiC by RTP Technique

Kwietniewski, N. / Golaszewska, K. / Piotrowski, T.T. / Rzodkiewicz, W. / Gutt, T. / Sochacki, M. / Szmidt, J. / Piotrowska, A.

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Document information

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Document information

Title:

Oxidation Process of SiC by RTP Technique

Contributors:

Kwietniewski, N. (author) / Golaszewska, K. (author) / Piotrowski, T.T. (author) / Rzodkiewicz, W. (author) / Gutt, T. (author) / Sochacki, M. (author) / Szmidt, J. (author) / Piotrowska, A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 529-532

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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