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Effects of substrate temperature on crystallite orientation of HfO~2 thin films
Effects of substrate temperature on crystallite orientation of HfO~2 thin films
Effects of substrate temperature on crystallite orientation of HfO~2 thin films
MATERIALS SCIENCE -WROCLAW- ; 27 ; 547-550
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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