Effects of substrate temperature on crystallite orientation of HfO~2 thin films: Fid-Bau Portal

Effects of substrate temperature on crystallite orientation of HfO~2 thin films

Wang, L. / Fan, B. / Wang, Z. / Cheng, X. / Wu, Y. / Chen, L.

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Effects of substrate temperature on crystallite orientation of HfO~2 thin films

Wang, L. / Fan, B. / Wang, Z. / Cheng, X. / Wu, Y. / Chen, L.

Effects of substrate temperature on crystallite orientation of HfO~2 thin films

Wang, L. / Fan, B. / Wang, Z. / Cheng, X. / Wu, Y. / Chen, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effects of substrate temperature on crystallite orientation of HfO~2 thin films

Contributors:

Wang, L. (author) / Fan, B. (author) / Wang, Z. (author) / Cheng, X. (author) / Wu, Y. (author) / Chen, L. (author)

Published in:

MATERIALS SCIENCE -WROCLAW- ; 27 ; 547-550

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0137-1339

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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