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The interface reaction of high-k La2Hf2O7/Si thin film grown by pulsed laser deposition
The interface reaction of high-k La2Hf2O7/Si thin film grown by pulsed laser deposition
The interface reaction of high-k La2Hf2O7/Si thin film grown by pulsed laser deposition
APPLIED SURFACE SCIENCE ; 256 ; 838-841
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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