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The optimum solidification and crucible rotation in silicon czochralski crystal growth
The optimum solidification and crucible rotation in silicon czochralski crystal growth
The optimum solidification and crucible rotation in silicon czochralski crystal growth
JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 24 ; 407-414
01.01.2010
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621
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