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Nano/micro-mechanical and tribological characterization of Ar, C, N, and Ne ion-implanted Si
Nano/micro-mechanical and tribological characterization of Ar, C, N, and Ne ion-implanted Si
Nano/micro-mechanical and tribological characterization of Ar, C, N, and Ne ion-implanted Si
Xu, Z.-H. (Autor:in) / Park, Y.-B. (Autor:in) / Li, X. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 25 ; 880-889
01.01.2010
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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