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    Nano/micro-mechanical and tribological characterization of Ar, C, N, and Ne ion-implanted Si

    New search for: Xu, Z.-H.
    New search for: Park, Y.-B.
    New search for: Li, X.

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    Nano/micro-mechanical and tribological characterization of Ar, C, N, and Ne ion-implanted Si

    New search for: Xu, Z.-H.
    New search for: Park, Y.-B.
    New search for: Li, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nano/micro-mechanical and tribological characterization of Ar, C, N, and Ne ion-implanted Si

    New search for: Xu, Z.-H.
    New search for: Park, Y.-B.
    New search for: Li, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Nano/micro-mechanical and tribological characterization of Ar, C, N, and Ne ion-implanted Si

    Contributors:

    Xu, Z.-H. (author) / Park, Y.-B. (author) / Li, X. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 25 ; 880-889

    Publication date:

    2010-01-01

    Size:

    10 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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