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Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations
Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations
Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations
Sysoev, E.V. (Autor:in) / Chugui, Y. / Gao, Y. / Fan, K.-C. / Taymanov, R. / Sapozhnikova, K.
01.01.2010
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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