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    Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations

    New search for: Sysoev, E.V.
    New search for: Chugui, Y.
    New search for: Gao, Y.
    New search for: Fan, K.-C.
    New search for: Taymanov, R.
    New search for: Sapozhnikova, K.

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    Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations

    New search for: Sysoev, E.V.
    New search for: Chugui, Y.
    New search for: Gao, Y.
    New search for: Fan, K.-C.
    New search for: Taymanov, R.
    New search for: Sapozhnikova, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations

    New search for: Sysoev, E.V.
    New search for: Chugui, Y.
    New search for: Gao, Y.
    New search for: Fan, K.-C.
    New search for: Taymanov, R.
    New search for: Sapozhnikova, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Nanorelief Measurements Errors for a White-Light Interferometer with Chromatic Aberrations

    Contributors:

    Sysoev, E.V. (author) / Chugui, Y. / Gao, Y. / Fan, K.-C. / Taymanov, R. / Sapozhnikova, K.

    Published in:

    Measurement Technology and Intelligent Instruments IX ; 51-55

    KEY ENGINEERING MATERIALS ; 437

    Publication date:

    2010-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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