Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating: Fid-Bau Portal

Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating

Zhang, G. / Li, B. / Jiang, B. / Chen, D. / Yan, F.

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Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating

Zhang, G. / Li, B. / Jiang, B. / Chen, D. / Yan, F.

Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating

Zhang, G. / Li, B. / Jiang, B. / Chen, D. / Yan, F.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

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Ähnliche Titel

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Titel:

Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating

Beteiligte:

Zhang, G. (Autor:in) / Li, B. (Autor:in) / Jiang, B. (Autor:in) / Chen, D. (Autor:in) / Yan, F. (Autor:in)

Erschienen in:

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 26 ; 119-124

Erscheinungsdatum:

01.01.2010

Format / Umfang:

6 pages

ISSN:

1005-0302

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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Microstructure and tribological properties of TiN, TiC and Ti(C, N) thin films prepared by closed-field unbalanced magnetron sputtering ion plating

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