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Plasma-based processes and thin film equipment for nano-scale device fabrication
Plasma-based processes and thin film equipment for nano-scale device fabrication
Plasma-based processes and thin film equipment for nano-scale device fabrication
Peng, X. (Autor:in) / Matthews, A. (Autor:in) / Xue, S. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 46 ; 1-37
01.01.2011
37 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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