Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Plasma-based processes and thin film equipment for nano-scale device fabrication

    New search for: Peng, X.
    New search for: Matthews, A.
    New search for: Xue, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Plasma-based processes and thin film equipment for nano-scale device fabrication

    New search for: Peng, X.
    New search for: Matthews, A.
    New search for: Xue, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Plasma-based processes and thin film equipment for nano-scale device fabrication

    New search for: Peng, X.
    New search for: Matthews, A.
    New search for: Xue, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Plasma-based processes and thin film equipment for nano-scale device fabrication

    Contributors:

    Peng, X. (author) / Matthews, A. (author) / Xue, S. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 46 ; 1-37

    Publication date:

    2011-01-01

    Size:

    37 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Nano-structured Fe thin film deposition using plasma focus device

    Rawat, R. S. / Zhang, T. / Gan, K. S. et al. | British Library Online Contents | 2006

    New nano-scale thin film material improves electronics

    Donaldson, Laurie | British Library Online Contents | 2017

    New nano-scale thin film material improves electronics

    Donaldson, Laurie | British Library Online Contents | 2017

    Fabrication and Characteristics of the Nano-Polysilicon Thin Film Transistors

    Zhao, X.F. / Wen, D.Z. / Zhuang, C.C. et al. | British Library Online Contents | 2013

    Molecular dynamics simulation of nano-scale Fe–Al thin film growth

    Chung, C. Y. / Chung, Y. C. | British Library Online Contents | 2006

    Back to top