Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers

Jiao, S. / Zielinski, M. / Michaud, J.F. et al. | British Library Online Contents | 2012

Mechanical characterization of biocompatible thin film materials by scanning along micro-machined cantilevers for micro-/nano-system

He, J. H. / Luo, J. K. / Le, H. R. et al. | British Library Online Contents | 2006

Magnetically Anisotropic Ni~2MnGa Thin Films: Coating Glass and Si Micro-Cantilevers Substrates

Madurga, V. / Favieres, C. / Vergara, J. | British Library Online Contents | 2010

Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers

Wang, P. / Du, H. / Shen, S. et al. | British Library Online Contents | 2012

Nanoindentation of a 10 nm thick thin film

Sawa, T. / Akiyama, Y. / Shimamoto, A. et al. | British Library Online Contents | 1999