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Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers
Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers
Detailed Experimental Study of Mean and Gradient Stresses in Thin 3C-SiC Films Performed Using Micromachined Cantilevers
Jiao, S. (Autor:in) / Zielinski, M. (Autor:in) / Michaud, J.F. (Autor:in) / Chassagne, T. (Autor:in) / Portail, M. (Autor:in) / Alquier, D. (Autor:in) / Alquier, D.
01.01.2012
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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