Influence of sputtering atmosphere on crystallinity and crystal orientation of AIN thin films deposited on polycrystalline MoSi~2 substrates

Akiyama, M. / Xu, C. / Nonaka, K. et al. | British Library Online Contents | 1998

The crystallinity of ZnS thin films prepared by MOCVD

Li, J. W. / Su, Y. K. / Yokoyama, M. et al. | British Library Online Contents | 1993

Processing and morphology of permeable polycrystalline silicon thin films

Dougherty, G. M. / Pisano, A. P. / Sands, T. | British Library Online Contents | 2002

Self-Induced Crystallinity in RF Magnetron Sputtered ZnO Thin Films

Ozen, I. / Gulgun, M. A. / Ozcan, M. | British Library Online Contents | 2004

Residual Stresses in Polycrystalline Thin Films

Scardi, P. / Dong, Y. H. | British Library Online Contents | 2000