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Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (001)Si0.7Ge0.3 by nanosphere lithography with a thin interposing Si layer
Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (001)Si0.7Ge0.3 by nanosphere lithography with a thin interposing Si layer
Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (001)Si0.7Ge0.3 by nanosphere lithography with a thin interposing Si layer
Cheng, S. L. (Autor:in) / Zhan, C. Y. (Autor:in) / Lee, S. W. (Autor:in) / Chen, H. (Autor:in)
APPLIED SURFACE SCIENCE ; 257 ; 8712-8717
01.01.2011
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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