Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (001)Si0.7Ge0.3 by nanosphere lithography with a thin interposing Si layer: Fid-Bau Portal

Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (001)Si0.7Ge0.3 by nanosphere lithography with a thin interposing Si layer

Cheng, S. L. / Zhan, C. Y. / Lee, S. W. / Chen, H.

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Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (001)Si0.7Ge0.3 by nanosphere lithography with a thin interposing Si layer

Cheng, S. L. / Zhan, C. Y. / Lee, S. W. / Chen, H.

Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (001)Si0.7Ge0.3 by nanosphere lithography with a thin interposing Si layer

Cheng, S. L. / Zhan, C. Y. / Lee, S. W. / Chen, H.

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Title:

Enhanced formation of periodic arrays of low-resistivity NiSi nanocontacts on (001)Si0.7Ge0.3 by nanosphere lithography with a thin interposing Si layer

Contributors:

Cheng, S. L. (author) / Zhan, C. Y. (author) / Lee, S. W. (author) / Chen, H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 8712-8717

Publication date:

2011-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)