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Fabrication and Evaluation of Al~2O~3 Films Using the Aerosol Deposition Method
Fabrication and Evaluation of Al~2O~3 Films Using the Aerosol Deposition Method
Fabrication and Evaluation of Al~2O~3 Films Using the Aerosol Deposition Method
Uemichi, Y. (Autor:in) / Nishikawa, K. (Autor:in) / Sato, Y. (Autor:in) / Yoshikado, S. (Autor:in) / Shinozaki, K. / Fujihara, S. / Chazono, H.
01.01.2011
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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