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    Fabrication and Evaluation of Al~2O~3 Films Using the Aerosol Deposition Method

    New search for: Uemichi, Y.
    New search for: Nishikawa, K.
    New search for: Sato, Y.
    New search for: Yoshikado, S.
    New search for: Shinozaki, K.
    New search for: Fujihara, S.
    New search for: Chazono, H.

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    Fabrication and Evaluation of Al~2O~3 Films Using the Aerosol Deposition Method

    New search for: Uemichi, Y.
    New search for: Nishikawa, K.
    New search for: Sato, Y.
    New search for: Yoshikado, S.
    New search for: Shinozaki, K.
    New search for: Fujihara, S.
    New search for: Chazono, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication and Evaluation of Al~2O~3 Films Using the Aerosol Deposition Method

    New search for: Uemichi, Y.
    New search for: Nishikawa, K.
    New search for: Sato, Y.
    New search for: Yoshikado, S.
    New search for: Shinozaki, K.
    New search for: Fujihara, S.
    New search for: Chazono, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Fabrication and Evaluation of Al~2O~3 Films Using the Aerosol Deposition Method

    Contributors:

    Uemichi, Y. (author) / Nishikawa, K. (author) / Sato, Y. (author) / Yoshikado, S. (author) / Shinozaki, K. / Fujihara, S. / Chazono, H.

    Published in:

    Electroceramics in Japan XIV Selected, peer reviewed papers from the 30^t^h Electronics Division Meeting of the Ceramic Society of Japan, October 29-30, 2010, Tokyo, Japan ; 211-214

    KEY ENGINEERING MATERIALS ; 485

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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